A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors
نویسندگان
چکیده
منابع مشابه
A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors
A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedo...
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ژورنال
عنوان ژورنال: Sensors
سال: 2009
ISSN: 1424-8220
DOI: 10.3390/s90100631